体積流量は定義された条件下でのガス体積を表し、質量流量は実際のガス量を測定します。正確なモニタリングと制御には質量流量の方が優れている場合が多い。
体積流量は定義された条件下でのガス体積を表し、質量流量は実際のガス量を測定します。正確なモニタリングと制御には質量流量の方が優れている場合が多い。
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